Micro Electro Mechanical Systems (MEMS) are
miniature (micro metric and mill metric in size), multifunction
system consisting of sensors, actuators and electronics they bring
mechanical structures to microelectronics. It is very promising
way of building smart integrated transducers. This technology
come from the integrated circuits micro fabrication technology
and thus has access to large pool of technical and scientific
resources. The applications are not only limited by our
imagination. Right now ,application are found in many areas like
domestic transportation, biotechnology biomedical engineering,
etc .The most popular devices are the pressure sensors and
accelerometers wildly used to control air bags in cars and other
safety devices. One of the unique advantages of Micro Electro
Mechanical System (MEMS) is the possibility of integrating
micromechanical devices with electronics. The application of
MEMS techniques to the fabrication of miniaturized mechanical
relays can solve some of the inherent difficulties involved with
transistor switches, not only that will have immediate impact on
several important products in both aerospace and consumer
electronics. One of the most exciting application areas for these
micromechanical relays is in radar and microwave circuits and
their systems.
Nitin K. Ahire : Xavier Institute of Engineering, Mahim
Affiliated to University of Mumbai, Mumbai, India
Authenticity touch
Electron mechanical
Consideration
MEMS Series Switch
MEMS Shunt Switch
Application
This paper presented and overview of MEMS switches.
The development of MEMS switches has been progressing
at a relatively rapid speed since the first practical dccontact
and capacitive switches. RF MEMS technology is
currently quite mature at the wafer level, and the
mechanics of switch actuation is well understood. It is
seen that a variety of switches available today covering the
0.1 -120 GHz. range, and the performance of RF switches
is truly spectacular when compared to p-i-n diode or FET
switches
[1] C. L. Goldsmith, Z. Yao, S Eshelmen, and D.
Denniston, “performance of low – loss RF MEMS
capacitive switches”, IEEE Microwave Guided.Wave
Lett, vol. 8, pp. 269 -271, Aug. 1998.
[2] A.Malczewski, S. Eshelmen, B. Pillans, J.Ehmke, and
C. L. Goldsmith, “X- Band RF MEMS phase shifter for
phased array application,”IEEE Microwave Guided
Wave Lett, vol. 9, pp. 517- 519, December.1999.
[3] B. Pillans, A.Malczewski, S. Eshelmen,C. L.
Goldsmith, “ Ka – Band RF MEMS phase
shifters,”IEEE Microwave Guided. Wave Lett, vol. 9,
pp. 520- 522, December.1999.
