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  Performance Evolution of Micro-Electro- Mechanical-Systems Switches for High Frequency Applications  
  Authors : Nitin K. Ahire
  Cite as:


Micro Electro Mechanical Systems (MEMS) are miniature (micro metric and mill metric in size), multifunction system consisting of sensors, actuators and electronics they bring mechanical structures to microelectronics. It is very promising way of building smart integrated transducers. This technology come from the integrated circuits micro fabrication technology and thus has access to large pool of technical and scientific resources. The applications are not only limited by our imagination. Right now ,application are found in many areas like domestic transportation, biotechnology biomedical engineering, etc .The most popular devices are the pressure sensors and accelerometers wildly used to control air bags in cars and other safety devices. One of the unique advantages of Micro Electro Mechanical System (MEMS) is the possibility of integrating micromechanical devices with electronics. The application of MEMS techniques to the fabrication of miniaturized mechanical relays can solve some of the inherent difficulties involved with transistor switches, not only that will have immediate impact on several important products in both aerospace and consumer electronics. One of the most exciting application areas for these micromechanical relays is in radar and microwave circuits and their systems.


Published In : IJCSN Journal Volume 3, Issue 5

Date of Publication : October 2014

Pages : 352 - 355

Figures : 01

Tables : --

Publication Link : Performance Evolution of Micro-Electro- Mechanical-Systems Switches for High Frequency Applications




Nitin K. Ahire : Xavier Institute of Engineering, Mahim Affiliated to University of Mumbai, Mumbai, India








Authenticity touch

Electron mechanical Consideration

MEMS Series Switch

MEMS Shunt Switch


This paper presented and overview of MEMS switches. The development of MEMS switches has been progressing at a relatively rapid speed since the first practical dccontact and capacitive switches. RF MEMS technology is currently quite mature at the wafer level, and the mechanics of switch actuation is well understood. It is seen that a variety of switches available today covering the 0.1 -120 GHz. range, and the performance of RF switches is truly spectacular when compared to p-i-n diode or FET switches










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